LTPS AOI
Specification Table:
LTPS AOI
Item Specifications
Glass size Up to 1300mm x 1500mm
Glass thickness 0.3mm~1.1mm
Optical Resolution > 1um
Target Defects Particles, line defect, residual
Line scan Output Defect positions, Defect sizes, Defect judgment
Optional Functions 1.SPC
2.Review System