In the panel coating process, the quality of colorimetry, film thickness, and optical density (OD) are critical parameters for various display functions.

FAVITE’s Colorimetry/Film thickness/OD metrology machine achieves high-precision automated target measurements through individual and integrated spectrometer measurement modules.

Features:
✔ High-Precision Measurement: Employs a high-precision optical imaging metrology module, combined with an X/Y gantry stage and specialized illumination design, to provide high-precision CD/Overlay measurements.
✔ Multi-Functionality: Can be equipped with individual or integrated colorimetry/film thickness/OD spectrometer measurement modules to satisfy multiple measurement requirements in a single tool.