In the semiconductor wafer manufacturing process, wafer inspection is an extremely critical step. Traditional manual or non-automated inspection methods are not only time-consuming but also susceptible to human error, resulting in misjudgments or missed defects. As wafer processes become increasingly refined and complex, and defect sizes continue to shrink, traditional inspection methods can no longer meet production capacity demands.

FAVITE’s high-speed AI-powered automatic optical review station for wafers can quickly complete high-speed automatic photography and real-time AI classification of various areas, dies, defect sizes, and defect types on the wafer, improving inspection efficiency and accuracy.

Features:
✔ Can read KLARF files for high-speed automatic defect photography by zone/die/defect size/defect type
✔ Provides real-time AI defect detection: inspect, capture, and classify instantly
✔ Can be equipped with 8″/12″ EFEM, supports SECS GEM200/300
✔ Defect photography and inspection at various QA inspection points/CP & FT in the wafer/packaging process