• Fine Resolution Array AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.4mm~1.1mm
    Optical Resolution >1um
    Target Defects Particles, line breakages, and other patterned defects
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Review System
  • Fine Resolution Array AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.4mm~1.1mm
    Optical Resolution > 2um
    Target Defects Particles, line breakages, and other patterned defects
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Review System
  • Array Glass AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 20 um
    Target Defects Particles, bubbles, water stain
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Review System
  • YMS-2020
    Item Specifications
    MNT Equipment Monitor
    RDV Remote Data Viewer
    SPC Statistical Process Control
    RTT Real-time Trend Tracer
    OVC Offline Video Classification
    DCJA Defect Code Judge Audit
  • Array Tokki Inspection System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Minimum Real Tokki Height 50 um
    Detected objects Tokkis
    Line scan Output Defect positions, estimated tokkis height
    Optional Functions SPC
  • Array High Speed Twin-heads Defect Review System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Microscopic lens X2, X5, X10
    Target Defects Particles, line breakages, and other patterned defects
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Simple measurement function
  • Array Multi-heads CDOL System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Measurement Reproducibility(3σ) X50 magnification : 0.025 um
    Measurement Time 3 secs per point
    Measured Objects Line width, slant pattern, overlay, alignment error, area
    Optional Functions 1.SPC
    2.Feedback result data to process
  • Array Glass AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 20 um
    Target Defects Particles, bubbles, water stain
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Review System
  • Cell Seal AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 20~30 um
    Target Defects Particles, seal breakages, seal widths, seal distances
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC