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  • CF Tokki Inspection System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Minimum Real Tokki Height 50 um
    Detected objects Tokkis
    Line scan Output Defect positions, estimated tokkis height
    Optional Functions SPC
  • CF Final Mura System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 300~500 um
    Target Defects CF Muras
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions SPC
  • CF Inline Color/Thickness/OD Measurement System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 300~500 um
    Target Defects CF Muras
    Line Scan Output Defect Positions, efect Size, Defect Judgment
    Color reproducibility x,y<= 0.001 Y<=0.1
    OD reprodicibility OD<=0.05
    Thickness reproducibility <5%
    Thickness measurement range 1um~30um
    Measured Objects CF R,G,B, BM, ITO, OC layers
    Output Data Object film thickness value
    Optional Functions SPC
  • CF RSME
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Measurement range (contact) 1mΩ~1KΩ
    Measurement range (non-contact) 5Ω~50Ω
    Reproducibility (1σ) Contact: <1% for range of 0.1Ω ~1KΩ
    <2% for other range
    Non-contact: <3%
    Measured objects CF ITO layer
    Output data object sheet resistance value
    Optional Functions 1.SPC
    2.Real time trend tracer
  • CF Multi-heads CDOL System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Measurement Reproducibility(3σ) X50 magnification : 0.1 um
    Measurement Time 3 secs per point
    Measured Objects Line width, BM, overlay, MVA,PS, area
    Optional Functions 1.SPC
    2.Feedback result data to process
  • CF AOI
    Item Specification
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 8um / 12um
    Target Defects Particles, pin holes, pattern defects, pattern shift
    Line Scan Output Defect positions, defect sizes, defect judgment
    Optional Functions 1. SPC
    2. Review System
  • CF Glass AOI
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Optical Resolution 20~30 um
    Target Defects Particles, bubbles, water stain
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Remote Image Verification
    3.Real-time Trend Tracer
    4.Review System
  • CF CF Color/Thickness/OD Measurement System
    Item Specifications
    Glass size Up to 1950mm x 2250mm
    Glass thickness 0.5mm~1.1mm
    Color reproducibility x,y<= 0.001 Y<=0.1
    OD reprodicibility OD<=0.05
    Thickness reproducibility <5%
    Thickness measurement range 1um~30um
    Measured Objects CF R,G,B, BM, ITO, OC layers
    Output Data Object film thickness value
    Optional Functions SPC