Mask 彙整 - Favite

Item	Specifications
Glass size	Up to 1300mm x 1500mm
Metal mask thickness	>10mm
Optical Resolution	>3um
Target Defects	Particles, organic residual, metal line cut
Line scan Output	Defect positions, Defect sizes, Defect judgment
Optional Functions	1.SPC
	2.Review System

Item	Specifications
Glass size	Up to 800mm x 920mm
Glass thickness	~10mm
Optical Resolution	>1 um
Target Defects	Particles, line defect
Line scan Output	Defect positions, Defect sizes
Optional Functions	1.SPC
	2.Review System