• OLED Mask AOI
    Item Specifications
    Glass size Up to 1300mm x 1500mm
    Metal mask thickness >10mm
    Optical Resolution >3um
    Target Defects Particles, organic residual, metal line cut
    Line scan Output Defect positions, Defect sizes, Defect judgment
    Optional Functions 1.SPC
    2.Review System
  • Array Mask AOI
    Item Specifications
    Glass size Up to 800mm x 920mm
    Glass thickness ~10mm
    Optical Resolution >1 um
    Target Defects Particles, line defect
    Line scan Output Defect positions, Defect sizes
    Optional Functions 1.SPC
    2.Review System