Item |
Specifications |
Glass size |
Up to 1300mm x 1500mm |
Metal mask thickness |
>10mm |
Optical Resolution |
>3um |
Target Defects |
Particles, organic residual, metal line cut |
Line scan Output |
Defect positions, Defect sizes, Defect judgment |
Optional Functions |
1.SPC |
|
2.Review System |
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