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  • Wafer AVI machine for OQA area
    Item Specification
    Target Objects 8" or 12" wafers, single or dual cassette deck.
    Defect Resolution 0.5um
    Target Defects Particles, incomplete etch, resist defects, scratches, large scale contamination
    Throughput 20~25WPH
    Optional Functions 1. SMIF
    2. FOUP
  • Wafer Edge AVI machine for OQA area
    Item Specification
    Target Objects 8" or 12" wafers, single or dual cassette deck.
    Defect Resolution 0.5um
    Target Defects Chips, cracks,contamination, layering delamination, residual slurry or photoresist
    Throughput 20~25WPH
    Optional Functions 1. SMIF
    2. FOUP
  • Wafer Backside AVI machine for OQA area
    Item Specification
    Target Objects 8" or 12" wafers, single or dual cassette deck.
    Defect Resolution 0.5um
    Target Defects Surface Particles, residues, contamination, scratches, damage, defect cluster
    Throughput 20~25WPH
    Optional Functions 1. SMIF
    2. FOUP