| Item |
Specifications |
| Glass size |
Up to 1300mm x 1500mm |
| Glass thickness |
0.4mm~1.6mm |
| Optical Resolution |
>7um |
| Target Defects |
Particles, line defect, residual, crake. |
| Line scan Output |
Defect positions, Defect sizes, Defect judgment |
| Optional Functions |
1.SPC |
|
2.Review System |
|
