Array Multi-heads CDOL System
Item Specifications
Glass size Up to 1950mm x 2250mm
Glass thickness 0.5mm~1.1mm
Measurement Reproducibility(3σ) X50 magnification : 0.025 um
Measurement Time 3 secs per point
Measured Objects Line width, slant pattern, overlay, alignment error, area
Optional Functions 1.SPC
2.Feedback result data to process