Wafer Backside AVI machine for OQA area
Item Specification
Target Objects 8″ or 12″ wafers, single or dual cassette deck.
Defect Resolution 0.5um
Target Defects Surface Particles, residues, contamination, scratches, damage, defect cluster
Throughput 20~25WPH
Optional Functions 1. SMIF
2. FOUP