Wafer Edge AVI machine for OQA area
Item Specification
Target Objects 8″ or 12″ wafers, single or dual cassette deck.
Defect Resolution 0.5um
Target Defects Chips, cracks,contamination, layering delamination, residual slurry or photoresist
Throughput 20~25WPH
Optional Functions 1. SMIF
2. FOUP