FPD AICM/Metrology 彙整 | Favite Inc. - 晶彩科技

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It uses a high-speed stage combined with multiple magnification lenses and an instant laser focusing system to provide instant, fast, and clear color images for various defects inspected by AOI equipment, and can be used with an automatic defect judgment system to quickly classify defects.
CD/OL Metrology Tool

Adapting a high-precision optical capturing measurement module combined with a special stage and light source design, it can provide high-precision measurement of CD/Overlay.
Inline Spectrometer

Adapting the X/Y gantry mobile platform, it can be equipped with chromaticity/film thickness/OD spectrometer measurement modules individually or integrated and can be used for automatic and precise measurement of chromaticity/film thickness/OD unevenness and abnormalities after each coating process.

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