Wallis L series – Glass wafer combo AOI
✔ Line scan high throughput inspection/high speed image capture
✔ Support product：
– 12” silicon wafer/metal frame surface inspection
– 12” glass wafer double side surface and edge inspection
✔ Equipped with 12” wafer/metal frame EFEM
✔ AI real-time defect classification function
✔ Yield management system
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