In the semiconductor, display panel, next-generation display, and IC substrate industries, with the continuous refinement and miniaturization of processes and circuits, the accuracy requirements at the microscopic level are extremely high. Product yield and performance often depend on the grasp of details, and any tiny defect can have a significant impact on product quality and performance.

Therefore, FAVITE introduces a multi-functional automated optical microscope system. With a compact design, it integrates multiple functions into a single inspection device, meeting customers’ needs for precise 2D and 3D defect detection and measurement at the R&D stage.

Features:
✔ Real-time autofocus
✔ Real-time image stabilization
✔ Smart measurement functionality
✔ Comprehensive brightfield and DIC observation capabilities
✔ Extended depth of field composition
✔ Large-area image stitching
✔ Image target navigation
✔ AI-powered defect target detection
✔ 3D profile measurement