✔ Defect Types: R/G/B defects, foreign material, PR residue, film breakage
✔ CMM Mask Compatibility: 12-inch
✔ Mask Defect Detection: Particle, fiber, etching defects, organic residue, metal residue
✔ Mask Dimension Measurement: Surface flatness, aperture size, and frame height
✔ AI-powered real-time defect classification
✔ Minimum Detectable Defect Size: 1μm