Micro OLED Mask AOI
✔ Defect Types: R/G/B defects, foreign material, PR residue, film breakage
✔ CMM Mask Compatibility: 12-inch
✔ Mask Defect Detection: Particle, fiber, etching defects, organic residue, metal residue
✔ Mask Dimension Measurement: Surface flatness, aperture size, and frame height
✔ AI-powered real-time defect classification
✔ Minimum Detectable Defect Size: 1μm
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Applied Field
Semiconductor Industry: Wafer Inspection, Advanced Packaging
Display Panel Industry: Surface Defects, Die Defects, Pixel Size Measurement
Printed Circuit Board Industry: Linewidth, Line Spacing Inspection and Metrology
Features
Micro OLED substrates require a metal mask during the evaporation process to allow organic materials to be precisely deposited onto corresponding positions to form pixels. Therefore, any defects or deviations on the mask can lead to pixel misalignment or severe display problems in subsequent processes.
FAVITE’s Micro OLED Mask Defect Inspection Machine can effectively detect minute defects on the mask and perform precise measurements of various mask dimensions.
Features:
✔ Defect Types: R/G/B defects, foreign material, PR residue, film breakage
✔ CMM Mask Compatibility: 12-inch
✔ Mask Defect Detection: Particle, fiber, etching defects, organic residue, metal residue
✔ Mask Dimension Measurement: Surface flatness, aperture size, and frame height
✔ AI-powered real-time defect classification
✔ Minimum Detectable Defect Size: 1μm
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