FAVITE’s automated optical CD/Overlay (OL) metrology machine provides high-precision CD and OL measurements, assisting customers in analyzing process deviations and optimizing process parameters.

Features:
✔ High-Precision Optical Imaging Metrology Module: Employs a high-magnification optical system and a high-resolution image sensor, enabling precise capture of minute dimensional variations.
✔ Specialized Stage and Illumination Design: Combines a stable motion stage and specialized illumination design to enhance repeatability and image acquisition speed.